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Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems

Customization: Available
Warranty: One Year
Type: Coating Production Line

Product Description

Basic Information
Model NO.
CY-MSP300S-3RF
Coating
Vacuum Coating
Substrate
Steel
Certification
CE
Condition
New
Sample Stage
Dia. 185mm
Heating Temp
Max 500℃
Rotate Speed
1-20rpm Adjustable
Chamber
Stainless Steel
Package
Wooden Case
Packaging & Delivery
Package Size
110.00cm * 100.00cm * 130.00cm
Gross Weight
360.000kg
Product Description
Vacuum Plating Thin Film Magnetron Sputtering PVD Coating Systems
The Three targets RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment. It is standardized, modular and customizable, offering 1-inch or 2-inch magnetron targets. Equipped with three 300W RF power supplies, it is ideal for non-metal preparation and multi-layer coatings.
The system includes two-channel high-precision mass flowmeters (customizable up to four) and advanced turbomolecular pump sets reaching ultimate vacuum levels of 1.0E-5Pa. With integrated computer control, users can efficiently manage vacuum and sputtering parameters.
Key Applications
This device is designed for preparing single-layer or multi-layer thin films, including:
  • Ferroelectric & Conductive films
  • Alloy & Semiconductor films
  • Ceramic & Dielectric films
  • Optical & Oxide films
  • Hard films & PTFE films
Technical Parameters
Sample Stage Size: φ185mm Temp Accuracy: ±1ºC
Max Temp: 500ºC Rotate Speed: 1-20rpm
Sputtering Head Quantity: 2" × 3 (1", 2" optional) Water Chiller: 10L/min flow rate
Cooling: Water Cooling Power: RF 300W × 3
Vacuum Chamber Size: φ300mm × 300mm Watch Window: φ100mm
Material: Stainless Steel Mode: Top cover open
Vacuum System Molecular pump (600L/S) + Rotary vane pump (1.1L/S)
Ultimate vacuum: 1.0E-5Pa
Performance: Reach 1.0E-3Pa within 20 minutes
Physical Specs Overall Size: 600×650×1280mm Total Weight: 300kg
Detailed Photos
Magnetron Sputtering System View 1
Magnetron Sputtering System View 2
Other Models
Alternative Coater Model
Coater Detail
Production Excellence
Manufacturing Facility
Quality Control
Frequently Asked Questions
Are you a manufacturer or a trading company?
We are professional laboratory instrument manufacturers with our own design team and factory, ensuring high product quality and optimal pricing.
How is the product after-sales service system?
The product warranty period is 12 months with lifetime maintenance available. Our technical departments respond within 24 hours to resolve any issues.
How long is the delivery time for standard and custom orders?
Standard stock items take 5-10 days. Customized instruments usually require 30-60 days depending on specific requirements.
How do you handle different power supply and plug standards?
We can supply appropriate transformers and plugs according to your local requirements and national power standards.
What are the available payment methods?
We accept T/T, L/C, D/P, and other secure trade guarantee methods.
How are the goods packaged and delivered?
Items are packed in standard export fumigation wooden boxes. Delivery can be via express, air, or sea shipping based on customer needs.

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